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1

Design, Modeling, and Characterization of a Microelectromechanical Diffuser Device for Laser Speckle Reduction

Tran, Thi-Kim-Trinh, Subramaniam, Sibi, Le, Cuong-Phu, Kaur, Sukhdeep, Kalicinski, Stanislaw, Ekwinska, Magdalena, Halvorsen, Einar, Akram, Muhammad Nadeem

Journal:

Journal of Microelectromechanical Systems

Year:

2014

Language:

english

File:

PDF, 9.80 MB

english, 2014

2

Extraction of elastic–plastic material properties of thin films through nanoindentaion technique with support of numerical methods

Łukasz Dowhań, Artur Wymysłowski, Paweł Janus, Magdalena Ekwińska, Olaf Wittler

Journal:

Microelectronics Reliability

Year:

2011

Language:

english

File:

PDF, 2.06 MB

english, 2011

3

[IEEE 2014 International 3D Systems Integration Conference (3DIC) - Kinsdale, Ireland (2014.12.1-2014.12.3)] 2014 International 3D Systems Integration Conference (3DIC) - Novel methodology for 3D MEMS-IC design and co-simulation on MEMS microphone smart system example

Bieniek, T., Janczyk, G., Ekwinska, M., Budzynski, T., Gluszko, G., Grabiec, P., Kociubinski, A.

Year:

2014

Language:

english

File:

PDF, 2.03 MB

english, 2014

4

New approach to estimate nanowear test results through nanoindentation test

M.A. Ekwińska, Z. Rymuza

Journal:

Microelectronic Engineering

Year:

2010

Language:

english

File:

PDF, 469 KB

english, 2010

5

Deposition of silicon oxide film from tetraethoxysilane using a pulsed dielectric barrier discharge

B. Ulejczyk, L. Karpiński, M. Scholz, M. A. Ekwińska, Z. Rymuza, T. Opalińska, E. A. Żukowska, K. Schmidt-Szałowski

Journal:

Czechoslovak Journal of Physics

Year:

2006

Language:

english

File:

PDF, 236 KB

english, 2006

6

The determination of the spring constant of T-shaped cantilevers using calibration structures

Sikora, Andrzej, Bednarz, Lukasz, Ekwiński, Grzegorz, Ekwińska, Magdalena

Journal:

Measurement Science and Technology

Year:

2014

Language:

english

File:

PDF, 1.23 MB

english, 2014

7

[IEEE 2010 3rd Electronic System-Integration Technology Conference (ESTC) - Berlin, Germany (2010.09.13-2010.09.16)] 3rd Electronics System Integration Technology Conference ESTC - Application of multi-criteria optimization algorithms to numerical material extraction of thin layers through nanoindentaion technique

Dowhan, Lukasz, Wymyslowski, Artur, Janus, Pawel, Ekwinska, Magdalena, Wittler, Olaf

Year:

2010

Language:

english

File:

PDF, 2.30 MB

english, 2010

8

[IEEE 2007 Digest of papers Microprocesses and Nanotechnology - Kyoto, Japan (2007.11.5-2007.11.8)] 2007 Digest of papers Microprocesses and Nanotechnology - Evaluation of ultrathin films of polymeric resists for nanoimprint lithography

Rymuza, Zygmunt, Koszewski, Adam, Ekwinska, Magdalena, Nowek, Andrzej

Year:

2007

Language:

english

File:

PDF, 734 KB

english, 2007

9

Piezoresistive cantilever working in a shear force mode for in situ characterization of exposed micro- and nanostructures

Sierakowski, Andrzej, Kopiec, Daniel, Janus, Paweł, Ekwińska, Magdalena, Płuska, Mariusz, Grabiec, Piotr, Gotszalk, Teodor

Journal:

Measurement Science and Technology

Year:

2014

Language:

english

File:

PDF, 1.98 MB

english, 2014

10

[IEEE 2014 10th International Conference on Advanced Semiconductor Devices & Microsystems (ASDAM) - Smolenice, Slovakia (2014.10.20-2014.10.22)] The Tenth International Conference on Advanced Semiconductor Devices and Microsystems - A MEMS design methodology for model-order-reduction, based on high-order parametric elements

Sanginario, Alessandro, Schropfer, Gerold, Zerbini, Sarah, Ekwinska, Magdalena, Houlihan, Ruth, Demarchi, Danilo

Year:

2014

Language:

english

File:

PDF, 3.09 MB

english, 2014

11

[IEEE 2013 IEEE International 3D Systems Integration Conference (3DIC) - San Francisco, CA, USA (2013.10.2-2013.10.4)] 2013 IEEE International 3D Systems Integration Conference (3DIC) - Dedicated MEMS-based test structure for 3D SiP interconnects reliability investigation

Bieniek, Tomasz, Janczyk, Grzegorz, Dobrowolski, Rafal, Szmigiel, Dariusz, Ekwinska, Magdalena, Grabiec, Piotr, Pawel, Janus, Zajac, Jerzy

Year:

2013

Language:

english

File:

PDF, 1.14 MB

english, 2013

12

SPIE Proceedings [SPIE Electron Technology Conference 2013 - Ryn, Poland (Tuesday 16 April 2013)] Electron Technology Conference 2013 - Dynamic method of calibration and examination piezoresistive cantilevers

Sierakowski, Andrzej, Kopiec, Daniel, Ekwińska, Magdalena, Piasecki, Tomasz, Dobrowolski, Rafał, Płuska, Mariusz, Domański, Krzysztof, Grabiec, Piotr, Gotszalk, Teodor P., Szczepanski, Pawel, Kisiel,

Year:

2013

Language:

english

File:

PDF, 822 KB

english, 2013

13

SPIE Proceedings [SPIE Electron Technology Conference 2013 - Ryn, Poland (Tuesday 16 April 2013)] Electron Technology Conference 2013 - Manufacturing, measurement and control of MEMS / NEMS electrostatically driven structures

Ekwińska, Magdalena A., Kunicki, Piotr, Piasecki, Tomasz, Janus, Paweł, Domański, Krzysztof, Bieniek, Tomasz, Grabiec, Piotr, Gotszalk, Teodor, Szczepanski, Pawel, Kisiel, Ryszard, Romaniuk, Ryszard S

Year:

2013

Language:

english

File:

PDF, 1.51 MB

english, 2013